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Product Update: Encoded Prober Shuttle

Reutlingen, Germany — Jan 27, 2021

Kleindiek Nanotechnik announced an encoded version of its market-leading PS8 nanoprobing platform. The PS8encoder allows closed-loop positioning of all eight manipulators and the 3-axes sub-stage within the same compact footprint. This increases throughput and enables start-to-finish low-kV workflows  — probing of 7 nm technology with record-low electron landing energies of 80 eV was demonstrated. Its best-in-class versatility and stability guarantee probing success beyond the 3 nm node. 

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Left: PS8 probing shuttle with 8 nano manipulators and 3-axes sub-stage. Right: scanning electron microscopy image showing nanoprobing on TSMC 7 nm technology at 80 eV beam energy.